1.测量中心距离:30mm±5mm,100mm±35mm,400mm±200mm 2.分辨率/重复精度:10um,100nm,400nm 3.测量范围:30±5mm,100±35mm,400±200mm 4.直线性:±0.1%f.s 5.光斑尺寸:约φ50um,约φ150um,约φ500um